Tag Archives: InvenSense

A Peek Inside the Invensense ITG-3200 Three-Axis Gyroscope

Contributed by St.J. Dixon-Warren and R. Krishnamurthy, Chipworks

Invensense is a leader in the MEMS gyroscope market segment. According to Yole, they experienced nearly 500% growth 2009 over 2008. They now hold the #1 position in the MEMS gyroscope for consumer electronics market.

Chipworks recent had a look inside their new three-axis digital gyroscope, the ITG-3200. The device is built using the Nasiri, single-chip, MEMS process, where the MEMS layer is sandwiched between a fusion-bonded cap wafer and the ASIC. The ASIC and MEMS are bonded using eutectic metal bond. The SEM image in Figure 1 provides a tilt-view of the corner of the MEMS chip, where the MEMS layer can be seen between the cap and ASIC die.

Continue reading

Follow

Get every new post delivered to your Inbox.

Join 181 other followers